Quartz Wafer Substrate
Ma Quartz Wafer Substrates ndi zowonda zomwe zimapangidwa ndi-purity quartz (SiO₂), zomwe zimagwiritsidwa ntchito kwambiri popanga ma semiconductors, optoelectronics, micro-electromechanical systems (MEMS), zida za kuwala, ndi zina.
Kufotokozera
Zinthu Zakuthupi
- Kuyera Kwambiri:Amapangidwa kuchokera ku quartz yopangidwa (monga silika wosakanikirana), yoyera kwambiri (Yoposa kapena yofanana ndi 99.99%) ndi zonyansa zochepa kuti zipewe kusokoneza magwiridwe antchito a chipangizocho.
- Kutentha Kwambiri:Kuchepa kwa kuchuluka kwa matenthedwe (≈0.55×10⁻⁶/ digiri) ndipamwamba-kukana kutentha (kufewetsa ~1600 digiri ), koyenera{4}}kanjira kotentha kwambiri.
- Mawonekedwe Owoneka:Broad transmission range (UV to IR), yokhala ndi ma transmittance apadera a UV, abwino kwa ma photomasks, magalasi, ndi zina zambiri.
- Chemical Inertness:Kugonjetsedwa ndi ma acid ndi alkalis (kupatula hydrofluoric acid), oyenera njira zonyowa.
- Kuyika kwamagetsi:High resistivity (>10¹⁶ Ω·cm), yabwino yotchingira masitepe kapena-zida zama frequency apamwamba.
Mapulogalamu
Kupanga Semiconductor
- Magawo azithunzi
- Zida za EUV
- Zonyamula za Wafer
Photonics & Optoelectronics
- Mawonekedwe a mawonekedwe a waveguide
- Kuyika kwa laser diode
- Quantum computing components
Specialty Applications
- Maziko owumbira a MEMS
- Zowonera zakuthambo zakuthambo
- Makina apamwamba{1}}a laser amphamvu
Njira Yopangira
- Raw Material Synthesis:Amapangidwa kudzera pakuyika kwa nthunzi (mwachitsanzo, SiCl₄ oxidation) kapena kuyeretsa quartz zachilengedwe.
- Kusungunuka ndi Kupanga:Kutentha kwambiri-kusungunuka kotsatiridwa ndi kuziziritsa m'miyendo kapena kujambula molunjika mu ndodo.
- Kudula:Odulidwa mu zowonda zopyapyala pogwiritsa ntchito macheka wawaya wa diamondi kapena kudula kwa laser.
- Kupera ndi kupukuta:Chemical mechanical polishing (CMP) imapangitsa kuti nanometer- ikhale yosalala.
- Kuyeretsa ndi Kuyang'anira:Kuchotsa tinthu tating'onoting'ono ndi zonyansa zachitsulo, ndikutsatiridwa ndi chilema ndi kuyesa kwa parameter.
Katundu
|
Zakuthupi |
Makhalidwe |
|
Chiyero |
＞99.99% |
|
Kuchulukana |
2.2g/cm3 |
|
Kuwonekera |
＞90% |
|
Mohs Kuuma |
5.5--6.5 |
|
Deformation Point |
1280 digiri |
|
Softening Point |
1750 digiri |
|
Annealing Point |
1250 digiri |
|
Kutentha Kwambiri (20 - 350 digiri) |
670J/kg. digiri |
|
Thermal Conductivity (20 digiri) |
1.4W/m. digiri |
|
Kutentha kwapakati (w/mk,1000 digiri) |
1.0-1.2 |
|
Refractive Index |
1.4585 |
|
Coefficient of Thermal Expansion |
5.510 -7cm/cm. digiri |
|
Kutentha - Kutentha kogwira ntchito |
1750-2050 digiri |
|
Kutentha kwa Service kwakanthawi - |
1450 digiri |
|
Kutalika kwa - kwa Service Temperature |
1100 digiri |
|
Chemical Properties |
Makhalidwe |
|
Kusamva acid |
Asidi Wamphamvu (kupatula HF), Wamphamvu alkali, organic solution |
|
Kutentha kwambiri Kusamva dzimbiri |
Zabwino kwambiri |
|
Chitsulo Chosayera |
5 ppm |
|
Zida Zamagetsi |
Makhalidwe |
|
Kukaniza |
7107Ω.cm |
|
Mphamvu ya Insulation |
250 ~ 400Kv/cm |
|
Dielectric Constant |
3.7~3.9 |
|
Dielectric Absorption Coefficient |
＜410-4 |
|
Dielectric Loss Coefficient |
＜110-4 |
|
Mechanical Properties |
Makhalidwe |
|
Compressive Mphamvu |
1100MPa |
|
Kupindika Mphamvu |
ku 67MPa |
|
Kulimba kwamakokedwe |
48MP pa |
|
Chiwerengero cha Poisson |
0.14~0.17 |
|
Young's Modulus |
72000MPa |
|
Shear Modulus |
31000MPa |
FAQ
Q1: Ndi kukula kotani kwa magawo a quartz wafer omwe alipo?
A: Standard kupanga mpaka 300mm awiri, ndi 450mm prototypes kupezeka kwa R&D.
Q2: Kodi mungapereke makonda makulidwe mbiri?
A: Inde - tikhoza kupanga:
- Zophika zopindidwa (zogwiritsa ntchito laser)
- Mapangidwe odulidwa mwaluso
- Mesa-malo omangidwa
Q3: Ndi protocol iti yoyeretsa yomwe mumalimbikitsa?
A: Njira yoyera ya RCA:
1. Kuchotsa zinthu zachilengedwe (H₂SO₄:H₂O₂)
2. Kuyeretsa kwa Ionic (HCl:H₂O₂)
3. HF-yomaliza kwa hydrophilic surface
Hot Tags: gawo laling'ono la quartz, China quartz wafer substrate opanga, ogulitsa, fakitale
Tumizani kufufuza
Muthanso Kukonda
